JPS6311730Y2 - - Google Patents

Info

Publication number
JPS6311730Y2
JPS6311730Y2 JP18965483U JP18965483U JPS6311730Y2 JP S6311730 Y2 JPS6311730 Y2 JP S6311730Y2 JP 18965483 U JP18965483 U JP 18965483U JP 18965483 U JP18965483 U JP 18965483U JP S6311730 Y2 JPS6311730 Y2 JP S6311730Y2
Authority
JP
Japan
Prior art keywords
carrier
wafer
frame
liquid
hanger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18965483U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6096833U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18965483U priority Critical patent/JPS6096833U/ja
Publication of JPS6096833U publication Critical patent/JPS6096833U/ja
Application granted granted Critical
Publication of JPS6311730Y2 publication Critical patent/JPS6311730Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Packaging For Recording Disks (AREA)
JP18965483U 1983-12-07 1983-12-07 半導体ウエ−ハ液処理用キヤリアハンガ− Granted JPS6096833U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18965483U JPS6096833U (ja) 1983-12-07 1983-12-07 半導体ウエ−ハ液処理用キヤリアハンガ−

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18965483U JPS6096833U (ja) 1983-12-07 1983-12-07 半導体ウエ−ハ液処理用キヤリアハンガ−

Publications (2)

Publication Number Publication Date
JPS6096833U JPS6096833U (ja) 1985-07-02
JPS6311730Y2 true JPS6311730Y2 (en]) 1988-04-05

Family

ID=30408842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18965483U Granted JPS6096833U (ja) 1983-12-07 1983-12-07 半導体ウエ−ハ液処理用キヤリアハンガ−

Country Status (1)

Country Link
JP (1) JPS6096833U (en])

Also Published As

Publication number Publication date
JPS6096833U (ja) 1985-07-02

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